江苏芯梦半导体设备有限公司

  • 地址:江苏省苏州市吴中经济开发区东吴南路25号城南科技产业园7幢(2号厂房)

  • 电话:0512-67296032

  • 传真:0512-67296032

  • 企业邮箱:sales@js-xm.com.cn

合作热线

  • 战略合作:fuxing.wang@js-xm.com.cn

  • 技术交流:louis.shao@js-xm.com.cn

  • 供应链合作:sunshine@js-xm.com.cn

道德规范举报热线

  • 若举报任何可能涉及违反芯梦半导体章程和政策的行为,请联系:

  • SUNSHINE@JS-XM.COM.CN

  • 或致电:0512-67296032

半自动晶圆盒FOUP清洗机

FC-300

FC-300 Overview

Business Model

Strengthen service. sales & marketing, design expertise

技术实力雄厚,专业的营销设计团队

Manufacture cleaners under ISO 9001 qualitycontrolIS09001

质量认证

Reduce overhead costs and more efficientoper-ations

操作简便、维护成本低

Provide shorter lead-time and improvedtechni-cal support

交货周期短,技术支持迅捷

Highly focused on repeat orders from existingsemi customers

半导体行业客户认可度高


FC-300 ntroduction

Over 25 vears ofexperience in cleaning equipment business在清洗机行业超25年经验Full sales and warranty support in Shanghai

在上海,苏州有完善的服务和销售团队Designed,manufactured and serviced box/-FOUP/FOSB/MASKPOD cleaners

自主研发设计,生产、服务,可用于片盒、FOUP、光罩盒清洗


Features

3rd Generation process cleaner for 50mm - 300m wafer handing products

针对2-12寸晶圆的第三代清洗设备High-purity materials, PP, PVDF 316 suS, etc

适用于各种材质盒子,包括PP、PVD......

Front load/unload, or optional front load & back unload ftor bulk mounting

前载/前卸、前载/.....种设计模式

Standard heated blower drying usingfab air

标准厂务热空气干量

Optional heated CDAN2 drving热CDAN2干燥可选

Standard ambient DIW cleaning标准DIW清洗容器

Small footprint ideal for cleanroom无尘室最小占地设计

Maximum throughput in the industry产能最大化设计

Outstanding local support and spare parts avalilbility

技术支持实力雄厚,备件齐全

Lowestmaintenance,high MTBF &uptime维护成本低,故障率低

-Manually load shipping boxes, Mask Pod or other wafer handling

products in the custom-designed racks in the machine

手动取放盒子,可根据客户要求设计方案

-Washing, rinsing and drving are fuilly automated when the operatorverifies that the parts are securely loaded on all four racks and themachine door closed properly, before pressing the GO button on thetouch screen自动化洗烘,键启动-

All spinning speeds and directions will be automatically controledthrough the HMI人机界面控制参数